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Project

Fourier Ptychographic Microscopy for High-Speed Semiconductor Wafer Inspection

University of Strathclyde

Project Type: PhD

Supervisor: Professor Gail McConnell

Website: www.coolled.com

Project Description

Semiconductor manufacturing requires ever-increasing inspection speeds and resolution as device complexity grows. Current automated optical inspection (AOI) systems often rely on high-magnification, high numerical aperture objectives to achieve the necessary defect detection performance, however, this imposes limits on field of view (FOV) and therefore limits throughput. At the same time, the industry is transitioning from traditional bulb-based illumination to advanced LED technologies including short-wavelength infrared (SWIR) sources driven by demands for improved stability, controllability, energy efficiency, and reliability.

This project will investigate the use of Fourier Ptychographic Microscopy (FPM) as a computational imaging method to enable high-resolution, large-FOV imaging using lower-magnification objectives. By synthetically increasing the effective numerical aperture, FPM offers the potential to significantly increase inspection speed without sacrificing the resolution required for critical defect detection. Both transmission-mode SWIR FPM and visible-range reflective FPM will be explored, making use of emerging high-brightness LED sources in these spectral regions.

The research aims to evaluate the performance trade-offs, practical implementation considerations, and industrial viability of FPM for semiconductor inspection. The outcomes will guide the potential development of new illumination products and imaging approaches within the sponsor company. This project will provide an industry-relevant doctoral training opportunity at the intersection of photonics, computational imaging, and semiconductor metrology. 

You will work in a combined laboratory and computational environment. Time will be split between optical experimentation, algorithm development, and data analysis. Laboratory work will involve microscope system development, illumination prototypes, and measurement of semiconductor-like samples. You will have your own desk in an office shared with other postgraduate students.

The company is open to informal discussions regarding flexible working arrangements where appropriate, including hybrid working for computational aspects of the project.

https://www.coolled.com/sustainability/gender-equality/

CDT Essential Criteria

A Masters level degree (MEng, MPhys, MSc) at 2.1 or equivalent in Physics or relevant Engineering subject.

Desire to work collegiately, be involved in outreach, undertake taught and professional skills study.

Project Essential Criteria

Strong foundation in optics, physics, photonics, or electrical engineering

Interest in computational imaging and experimental optical system development

Ability to work across simulation, hardware prototyping, and data analysis

Good problem-solving skills and willingness to interact closely with industry

Project Desirable Criteria

Experience with Python/MATLAB for image reconstruction or modelling

Background in microscopy, semiconductor processes, or metrology.

Experience with optical alignment or laboratory experimentation.

Familiarity with Fourier optics and imaging theory.

The CDT

The CDT in Applied Photonics provides a supportive, collaborative environment which values inclusivity and is committed to creating and sustaining a positive and supportive environment for all our applicants, students, and staff. For further information, please see our ED&I statement: https://bit.ly/3gXrcwg.

Forming a supportive cohort is an important part of the programme and our students take part in various professional skills workshops, including Responsible Research and Innovation, and attend outreach training.

Funding

The CDT in Applied Photonics is participating in the UK Government’s TechExpert pilot scheme https://www.gov.uk/guidance/techexpert. As part of this initiative, students entering EngD and PhD programmes in 2026 who are eligible for home fee status will receive a generous stipend of £31,000.

TechExpert funded students also engage in up to 10 days per year of enriching additional activities, such as outreach to inspire future talent and initiatives that support widening participation in technology careers.

In addition to this, students have access to a conference budget of up to £4,000 and tuition fees paid for the duration of the programme.

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Home » Fourier Ptychographic Microscopy for High-Speed Semiconductor Wafer Inspection

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